Study on optical and electric properties of ultrafine-grained indium films

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成果类型：

期刊论文

作者：

Wang, Meng;Wang, Chuang;Tian, Ye;Zhang, Jianming;Guo, Chuanfei;...

通讯作者：

Liu, Qian

作者机构：

[Liu, Qian; Zhang, Xinzheng; Wang, Meng] Nankai Univ, MOE Key Lab Weak Light Nonlinear Photon, TEDA Appl Phys Sch, Tianjin 300457, Peoples R China.

[Liu, Qian; Zhang, Xinzheng; Wang, Meng] Nankai Univ, Sch Phys, Tianjin 300457, Peoples R China.

[Zhang, Jianming; Liu, Qian; Wang, Meng; Tian, Ye; Wang, Chuang] Natl Ctr Nanosci & Technol, Beijing 100190, Peoples R China.

[Zhang, Jianming; Tian, Ye; Wang, Chuang] Chinese Acad Sci, Grad Sch, Beijing 100080, Peoples R China.

[Guo, Chuanfei] Univ Houston, Dept Phys, Houston, TX 77004 USA.

通讯机构：

[Liu, Qian] N

Natl Ctr Nanosci & Technol, 11 Beiyitiao, Beijing 100190, Peoples R China.

语种：

英文

关键词：

Electric properties;Indium;Optical properties;Thin films;Ultrafine grain

期刊：

Applied Surface Science

ISSN：

0169-4332

年：

2014

卷：

296

页码：

209-213

DOI：

10.1016/j.apsusc.2014.01.093

基金类别：

NSFCNational Natural Science Foundation of China (NSFC) [11374069, 61006078]; NBRPCNational Basic Research Program of China [2010CB934102, 2010CB934101]; Project of International ST Cooperation [2010DFA51970]; Eu-FP7European Commission [247644]

机构署名：

本校为其他机构

院系归属：

信息与电子工程学院

摘要：

Indium nanofilms composed of ultrafine grains have many applications in photovoltaic technology, microelectronics industry, grayscale lithography and so on. It is unquestionable that ultrafine grains have an important influence on physical properties of the films. For investigating the role of grain size in optical and electric properties of the films, we took In as an example to deeply study the relationship between grain sizes and the optical density (OD) spectra as well as the square resistance in the In, In 2 O 3 and ITO nanofilms with ultr...

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Study on optical and electric properties of ultrafine-grained indium films

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